【摘要】 光栅计量技术向纳米测量发展需要更高的光栅细分倍数。基于所研制的快速互补函数细分算法,细分精度即仅取决于测量启停时刻的光栅信号采样精度,选用市场上货源丰富的、低成本的扫描式多通道模数转换卡,即可实现光栅纳米测量所需的高倍数细分。在测量的启停时刻对光栅信号进行精确测量,在测量过程中对光栅信号进行快速跟踪测量。实验表明,当采用15位200 kHz的A/D转换卡对20μm栅距的光栅信号进行非同步采样时,可以得到小于1 nm的测量分辨率及大于120 mm/s的测量速度。更多还原

【Abstract】 Grating metrology technology is advanced for nanometer measurement,for which the higher subdivision number of one cycle of grating is required.Based on the developed fast subdivision formula of mutual compensation functions,by which the grating subdivision precision is only determined by the start and end sampling precision of grating signals,the low-cost scanning multi-channels analogy to digit converter being well sold and plentiful in market is adopted for grating nanometer measurement.As long as the high sampling precision of grating signals is conducted in the start and end measurement and the fast tracing sampling is kept in the process measurement,the higher subdivision number of one cycle of grating will be achieved.The experiment indicates that when 15?bits 200?kHz A/D converter is used to asynchronously sample the grating signals with 20?μm pitch,the less than 1nm measuring resolution and 120?mm/s measuring speed can be obtained.更多还原