【摘要】 针对一种用于微结构几何量测量的微机电系统(MEMS)三维微触觉式传感器,开展了传感器的性能测试,系统评价了该传感器的性能。为了检测传感器的输出信号,提出了敏感梁上排布16个压阻的三维差动式压阻排布方式,并研究相应的压阻信号的全桥检测方法和微弱信号的调理电路,研究了基于高精度坐标定位平台的传感器三维性能测试方法和测试装备。通过实验,获得传感器的轴向100 nm的分辨力,4.7μm的量程,低于0.15%的线性误差,低于0.5%的轴间耦合度;以及在横向100 nm的分辨力和低于0.37%的线性误差等性能参数。更多还原

【Abstract】 The performance test about a 3D micro-electro-mechanical system(MEMS) micro tactile sensor for dimension measurement of micro structure is carried out.The performance of the sensor is evaluated comprehensively.To measure the output signal of the sensor,a 3D differential arrangement of 16 piezo-resistors on beam is presented,accordingly,the measuring method of Wheatstone bridge of piezoresistor and circuit for weak signal condition are developed.The 3D performance test method based on the precision coordinate platform is studied,and a test setup is introduced.Through the experiments,the performance of the sensors is verified with resolution of 100 nm,measuring range of 4.7 μm,linearity of ±0.15%,cross-talk between x/y and z direction of 0.5% in axial direction,and resolution of 100 nm,linearity of ±0.37%.更多还原