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微型三坐标测量机定位精度的研究
The Study on Position Accuracy of Micro-coordinate Measuring Machine
【摘要】 为了提高微型三坐标测量机粗定位平台的定位精度,在不增加新硬件的基础上,构建了由激光干涉仪、工控机和步进电机组成的粗定位闭环控制系统。并给出了步进电机在开环和闭环状态下的定位检测数据。检测结果表明:该系统明显地提高了步进电机的定位精度,满足了系统对于粗定位平台的定位要求。
【Abstract】 In order to improve the position accuracy of micro-coordinate measuring machine(CMM) rough localization platform,a closed-loop controlling system was constructed by laser interferometer,industrial control computer and stepper motor.The detected data of stepper motor in both open-loop and closed-loop stage were given.By comparing the detection result,it shows that the closed-loop stage increases the position accuracy of stepper motor,which satisfies the demand of micro-CMM rough localization platform.
【关键词】 步进电机;
压电陶瓷;
激光干涉仪;
闭环控制;
【Key words】 Stepper motor; Piezoelectric ceramic; Laser interferometer; Closed-loop control;
【Key words】 Stepper motor; Piezoelectric ceramic; Laser interferometer; Closed-loop control;
【基金】 国家自然科学基金资助项目(批准号:50575178)
- 【文献出处】 机床与液压 ,Machine Tool & Hydraulics , 编辑部邮箱 ,2008年11期
- 【分类号】TH721
- 【被引频次】3
- 【下载频次】158