【摘要】 以高精度干涉条纹小数测量、研合膜厚度的量化控制与量块内部温度测量为重点,对进行一等量块光波干涉测量的各要件进行了分析,并引用国际比对结果予以了验证。更多还原

【Abstract】 The article takes the high precision measurement of interference fringes decimal, quantitative control of lapping-in film thickness, and temperature measurement of the internal block as main points. The First gauge block light interference measurement of the elements were presented and analyzed by first, and then we invoked the international comparison results to verify them.更多还原