【摘要】 CVD ZnS是中长波前视红外窗口和整流罩的合适材料,文中从折射率、热应力、透射波段和附着力等方面考虑,由实验设计出HfO2/非晶膜双层结构作为ZnS与金刚石保护膜间的过渡层,采用射频反应磁控溅射技术在ZnS表面制备过渡膜层,并采用划痕法研究了薄膜的显微结构对其与衬底间附着力的影响。结果表明,金刚石能够在HfO2/非晶膜过渡层上形核、生长,得到优质的保护膜,同时过渡层也缓解了金刚石膜与ZnS衬底间由于热膨胀系数的较大差异而引起的膜层脱落问题,单面沉积过渡层的ZnS在2～12μm范围具有增透膜的作用。与AlN/非晶膜组成的过渡层相比,HfO2/非晶膜组成的过渡层具有更小的残余应力。在典型实验条件下,该过渡层与ZnS衬底附着性良好,研究发现薄膜的显微结构对附着力的大小有重要影响,形成细小致密的柱状纤维结构,有利于提高附着力。更多还原

【Abstract】 The most successful and widely used material for high speed forward looking IR window and dome is chemical vapour deposited(CVD) ZnS.Taking refractive index,thermal stress,transmission spectrum and adhesion into account,the stack interlayers of HfO2/amorphous films between ZnS and diamond protective coating were designed.The interlayers were deposited on ZnS substrate by RF reactive magnetron sputtering.Effect of film microstructure on adhesion between interlayer and substrate was investigated.Results reveal that the stack interlayers of HfO2/amorphous films provides good surface for diamond nucleation and growth,and releases the thermal expansion mismatch between ZnS and diamond coating.In addition,ZnS substrate with the stack interlayers has good transmission at 2￣12 μm.To some extent,the interlayers acts as anti "reflecting coating.Compared with the stack interlayers of AlN/ amorphous film,the stack interlayers of HfO2/amorphous film acquires reduced residual stress.The typical interlayers with compact columnar microstructure shows good adhesive ability on ZnS.更多还原