【摘要】 采用气体放电活化反应蒸发沉积(GDARE)法低温生长纳米颗粒ZnO薄膜。在不同温度下测试其对乙醇的灵敏度,结果表明:285℃附近纳米颗粒ZnO薄膜的灵敏度最高,为9.76,并且其最佳工作温度区间较窄。通过对ZnO薄膜的AFM表面形貌分析、SEM剖面分析和光学透射谱测试,可推测薄膜具有多孔性柱状晶表面结构,结合ZnO薄膜通入乙醇前后的阻抗谱测试结果,从晶粒晶界效应上对纳米颗粒ZnO薄膜的气敏机理进行了讨论。更多还原

【Abstract】 Nanometer particle ZnO thin films grown at low temperature were deposited by gas discharge active reaction evaporation.The ethanol sensitivity of ZnO thin films was tested at various temperatures.The results show that the highest sensitivity of nanometer particle ZnO thin films is 9.76,about at 285 ℃,while the optimum operating temperature area is narrow.The surface morphology,section view and optical transmittance spectra was investigated by atomic force microscopy(AFM),scan electron(microscopy(SEM)) and spectrophotometer.We speculate the films have porous columnar structure.Considering complex impedance spectra of ZnO thin films in air and ethanol gas,the gas sensitivity mechanism of nanometer particle ZnO thin films was discussed on the effect of grain and grain boundary.更多还原