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标准分划尺在CCD压痕直径测量系统校准中的应用
Application of Standard Line-scale to Calibration of Indentation Diameter Measurement System
【摘要】 在高精度测量中,为达到测量精度要求,需要对CCD像素进行校准。本文介绍一种简单易行的采用标准分划尺校准CCD像素的方法。首先标准分划尺经过线纹工作基准装置校准;通过对标准分划尺成像,得出在一段标准距离下的像素数;最后得出每个像素所对应的实际距离。实验证明,这种方法能够有效地抑制综合误差,改善测量精度。
【Abstract】 During the high accurate measurement,it needs to calibrate the value of the CCD pixel in order to fit the accuracy required.In this paper a simple and convenient method for calibrating the CCD pixel with standard line-scale is introduced.The line-scale is calibrated by laser interferometer.We can get the number of pixel corresponding to a length of standard line-scale.Then we can get the real distance corresponding to every pixel.The results of the experiments show that this method can restrain the compositive error and improve the accuracy of measurement.
【Key words】 CCD imaging; standard line-scale; high accuracy; calibration of pixel;
- 【文献出处】 计测技术 ,Metrology & Measurement Technology , 编辑部邮箱 ,2008年05期
- 【分类号】TH711
- 【被引频次】1
- 【下载频次】59