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SnO2纳米薄膜的溶胶-凝胶法制备及气敏性能
The sol-gel synthesis and gas sensitivity of SnO2 thin film
【摘要】 以SnCl2.2H2O和无水乙醇为原料制备SnO2透明溶胶,通过浸渍法在云母基片上制备了SnO2纳米薄膜。利用XRD和AFM手段研究了薄膜的结构和形貌,结果表明,SnO2纳米薄膜的球形粒径约为15nm;随着薄膜沉积层数的增加或工作温度的升高,薄膜电阻逐渐减小。气敏特性研究表明,薄膜对H2有较好的敏感性。
【Abstract】 Transparent SnO2 sols were obtained by a sol-gel method from SnCl2·2H2O in absolute ethanol,and SnO2 thin film were prepared by dip-coating technique.The microstructure of thin films was studied by XRD、AFM.The average size of the spherical SnO2 particles obtained is 15nm.The sheet resistance of the multi-ply SnO2 decreased with the increased of the film thickness and the operating temperature.The further study on its gas sensitivity demonstrated that it had a good sensitivity to H2.
【基金】 国家“863”计划项目(2004AA302032)
- 【文献出处】 化工新型材料 ,New Chemical Materials , 编辑部邮箱 ,2008年01期
- 【分类号】TB383.2
- 【被引频次】11
- 【下载频次】542