【摘要】 利用溶胶-凝胶技术在玻璃衬底上制备了ZnO∶Al薄膜,表征了薄膜的结构、光透过和光致发光特性,探讨了热处理温度对薄膜晶体结构和光学性质的影响.结果表明,在热分解温度400℃和退火温度600℃时,ZnO∶Al薄膜的C轴择优取向明显,透过率较高.在热处理温度400℃情况下,激发波长340nm的光致发光谱中有三个发光中心,紫外发光强度随退火温度的升高先升高后下降,500℃时发光强度最强.其它两个发光峰的强度随退火温度的升高而降低甚至消失.激发波长不同,ZnO∶Al薄膜的发光中心和强度均发生变化.更多还原

【Abstract】 AZO thin films were prepared by sol-gel technique on glass substrates.An investigation was made on the optical transmittance and photoluminescence of AZO thin films.Influence of the heat treatment on the crystal structures and optical properties of AZO thin films was discussed.The results show that the C axis orientation and optical transmittance are optimal for pre-heat temperature at 400 ℃ and annealing temperature at 600 ℃.There are three emission center in photoluminescence spectra with pre-heat temperature 400 ℃ and excitation wavelength 340 nm.The intensity of UV peaks goes up first and then goes down with the increase of annealing temperature.The intensity arrives at the top when the temperature reaches at 500 ℃.The other two intensities of peaks decrease and even disappear with increasing annealing temperature.Both emission center and intensity change with different excitation wavelength.更多还原