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溶胶-凝胶法制备TiO2-SiO2多层增透膜

Reflection Reducing Coating Composed of TiO2-SiO2 Multilayer Films Prepared Using Sol-Gel Processing

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【作者】 王永强胡晓云苗仲海周引穗黄亚娜马一平

【Author】 WANG Yong-qiang1,2,HU Xiao-yun1,MIAO Zhong-hai1,ZHOU Yin-sui1,HUANG Ya-na1,MA Yi-ping1(1 Department of Physics,Northwest University,Xi’an 710069,China)(2 Department of Chemistry and Physics,Henan Polytechnic University,Jiaozuo,Henan 454000,China)

【机构】 西北大学物理学系西北大学物理学系 西安710069河南理工大学理化系河南焦作454000西安710069

【摘要】 在酸催化体系中以钛酸丁酯为前驱体制得TiO2溶胶,以正硅酸乙酯(TEOS)为前驱体制得SiO2溶胶,采用提拉法在普通载玻片上镀膜.辅助MASS膜系设计软件进行模拟计算,得到了透射比为99%的膜片.根据理论模拟结果,实验采用交叉镀膜,制备出了宽带增透TiO2-SiO2多层膜.用紫外-可见分光光度计测量了样品的透射光谱.实验发现,样品具有明显的宽带增透效果:在400~700nm波段,当光线垂直入射时,增透5.5%左右;45°角入射时,可增透10%.

【Abstract】 Titanic oxide sol and silicon dioxide sol are obtained by hydrolysis and co-condensation reactions occurred in acid-catalyzed system by carefully controlling the sol-gel process of tetrabutylorthotitanate and tetraethoxysilane(TEOS).They are coated on glass slides by dipping method.In virtue of the thin film designing software MASS,broadband reflection reducing coating composed of TiO2-SiO2 multilayer films have been prepared.The transmission spectrum of the simulation is 99%.The transmission spectra of the samples are characterized by ultraviolet-visible spectrophotometer.For the case of vertical incidence,the average transmission of the slide sample increases 5.5% compared to the uncoated one in the spectra range from 400 nm to 700 nm,for 45°incidence the increase is 10%.

【基金】 陕西省科技厅科技攻关项目(2004k05-G26)资助
  • 【文献出处】 光子学报 ,Acta Photonica Sinica , 编辑部邮箱 ,2008年06期
  • 【分类号】O484.1
  • 【被引频次】15
  • 【下载频次】675
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