【摘要】 为了对激光干涉仪、高精度位移传感器等测量系统进行纳米级精度的非线性误差校准,需进一步提高中国计量科学研究院与清华大学合作研制的差拍F-P干涉仪的线性度、稳定性及测量范围。在合理分析空气折射率变化及He-Ne激光器纵模调谐范围等因素对测量的影响基础上,设计并制作了密封干涉光路的真空系统,并用调谐范围较大的半导体激光器作为工作激光器。实验结果表明,系统在大于1/4波长的行程范围内的线性度有明显的提高,最大非线性误差由8.93 nm减小至1.19 nm。更多还原

【Abstract】 In order to calibrate the nonlinear error of laser interferometers and high-precision displacement sensors with an accuracy of nanometer order,the linearity,stability and measurement range of the beat frequency Fabry-Pérot interferometer developed by National Institute of Metrology and Tsinghua University should be improved.Based on analysis of the influences of factors,such as the change of air refractive index and the tunable range of He-Ne laser,a vacuum system that airproofs the interference light path is designed and built,and a diode laser with a large tunable range is used to take place of the He-Ne laser.The experimental results show that the nonlinear error of the system in the range of longer than a quarter of the wavelength is reduced from 8.93 nm to 1.19 nm.更多还原