【摘要】 与光刻胶工艺相比,染料聚合物工艺母盘刻录的光盘坑形有很大区别。在已知文献中对坑点形貌与读出信号关系的研究结果已不再有效。使用基于角谱分解的衍射理论,利用原子力显微镜得到的坑形,对两种工艺光盘的调制幅度参数进行了仿真。仿真结果表明,对染料聚合物工艺而言,在较小的深度和宽度下能获得与光刻胶工艺光盘相当的调制幅度。对实际光盘几何尺寸和电信号参数的测试结果证明了仿真结果的正确性。更多还原

【Abstract】 The pit profile of optical disks via dye-polymer mastering greatly differs from that via photo-resist mastering.The previous research results on relationship between pit size and readout signal in the known literature are no longer available for the dye-polymer mastered optical disk.The readout signal modulated amplitude of these tow pit profile types is simulated.The simulating model is based on the pit profile measured by an atom force microscope and the theory of angular spectrum decomposition.The simulated result demonstrates that for dye-polymer mastered disks,identical modulated amplitude can be attained when depth and width are smaller than those of photo-resist mastered disks.Geometrical size and electrical parameter of actual disks are measured.The measured result validates the simulated result.更多还原