【摘要】 传统的共焦显微探测多是采用单点机械扫描方式完成的,存在着扫描效率低的缺点,针对于此,一种多光束共焦显微系统成为当前的研究热点,通过不同方式对光束进行分割,使单点检测变为多路并行检测,提高了测量速度,减少了扫描过程中光源和振动噪声的影响,实现多光束的同步测量。介绍了几种典型的单光束和多光束共焦显微测量系统的原理、研究进展、发展方向及作者在该方面的研究。更多还原

【Abstract】 With the defect of low scanning efficiency and complex mechanism,the conventional confocal detection was finished by single-point mechanically scanning mode.Therefore,microlens-array confocal arrangement measurement had been a hot research topic,which changed the single-point scanning mode to multi-channel parallel detection to gain the full time synchronous measurement.In the meanwhile,the multi-beam confocal detection system owned high working speed and little effect on scanning process from light source or vibration noise.The principle,recent progress and development tendency of several typical microlens-array confocal microscopy measurement techniques are mainly discussed.更多还原