【摘要】 用电子回旋共振等离子体(ECR)系统,在气压、衬底温度以及微波功率等外界条件不变的情况下,仅改变甲烷浓度制备金刚石薄膜,利用傅里叶红外吸收光谱仪(FTIR)对甲烷浓度为6%的ECR系统进行实时监测,分析研究了不同沉积时间条件下,甲烷和氢气产生的等离子体对薄膜早期成核、生长过程以及衬底的影响,并结合Raman光谱X射线衍射(XRD)和扫描电镜(SEM)对金刚石薄膜进行了分析。更多还原

【Abstract】 The diamond thin films were deposited on silicon substrates under invariable conditions of process pressure,substrate temperature negative direct-current(dc) bias of substrate and microwave power while the rations of methane(CH4) to hydrogen(H2) changing from 3% to 5% and 9% using electron-cyclotron-resonance microwave plasma-assisted chemical vapor deposition technique(ECRCVD).In situ Fourier transform infrared spectroscopy(FTIR)have been used to study the plasma species absorbed on the substrate surfaces as well as the species above the substrates surfaces both before and during the nucleation and film growth.It is demonstrated that these techniques canprovide useful information on the early stages of diamond growth.When correlated with film properties measured by Raman spectroscopy and scanning electron microscopy,the results from FTIR indicate that the absorption of the graphitic and diamond phases are related to the ratio of CH4 to H2 and can be identified at the early stages of film growth.更多还原