【摘要】 类金刚石膜是无定形碳中含sp3键的亚稳态结构。由于它的组成、光学透过率、硬度、折射率和在化学腐蚀剂中的惰性以及抗摩擦性能十分相似于金刚石,其应用领域不断被拓宽,因此对类金刚石的研究也日益成为热点。本文介绍了类金刚石的性能、制备类金刚石膜的物理气相沉积和化学气相沉积方法,概括了类金刚石膜在机械、电磁学、光学、医学以及其它领域的应用,最后指出了类金刚石膜的研究现状及其发展趋势。更多还原

【Abstract】 Diamond-like carbon(DLC) is a metastable form of amorphous carbon containing a significant fraction of sp3 bonds.Due to the similarity of the makeup,optical transmittance,hardness,refractive index,the inertness in chemical corrosive and friction properties with Diamond,DLC has drawn ever-increasing attention and its application areas are widening.In this paper DLC`s properties,physical vapor deposition and chemical vapor deposition of the Diamond-like Carbon Film are introduced.Also,the DLC film is described with the applications in the mechanical area,electromagnetic area,optical area,medical area and other areas.Finally,the further study tendency was pointed out.更多还原