【摘要】 PDMS是制作微流控芯片的主要材料。PDMS芯片制作的主要方法是模塑法,模塑法要求有良好的塑性成型模具。SU-8以其良好的微加工特性,目前已广泛应用于微机械结构的制作,也用于PDMS塑性成型的模具。本文根据模具的特殊性,如平整、无裂纹、可多次使用等要求,研究了影响SU-8模具结构与基底材料硅片的黏附性和形成裂纹的因素,优化了SU-8微模具加工工艺,在以0.5℃/min进行升降温、210 mJ/cm2的曝光剂量、200℃条件下硬烘30min条件下得到较好的SU-8模具,提供了一种快速、复用性高、低成本的PDMS微芯片塑性成型的SU-8模具的制作方法。更多还原

【Abstract】 PDMS is the main material for manufacturing microfluidic chips,and the most used method for PDMS fabrication is plastic molding,which requires good plastic mold.SU-8 has been widely applied for MEMS fabrication and plastic mold for PDMS because of its micro-machining characteristics.According to the requirements of mold such as flat,crack-free,and reusable,this paper study factors influencing the cohesion between SU-8 mold structure and silicon substrate and cracks,optimizing the fabrication process of SU-8,in the condition of heat treatment at the rate of 0.5℃/min,dosage at 210 mJ/cm2,and hardbake at 200℃ for 30min,providing a fast,reusable,low cost SU-8 mold manufacturing method for PDMS microchip plastic molding.更多还原