【摘要】 微型扩散/收缩泵属于无阀型微机械往复微泵,其性能可以通过优化微型扩散/收缩管的结构参数得到优化。本文利用Fluent软件模拟得到最优的微型扩散/收缩管的结构参数,并提出微型固定鳞片式扩散/收缩管结构。基于硅基MEMS技术制备微型扩散/收缩泵,并通过Fluent软件模拟和实验验证了鳞片式扩散/收缩泵可以提高流阻效率11%。更多还原

【Abstract】 Micro valveless nozzle/diffuser pump is a diaphragm pump,which utilize the different pressure drop characteristics of flow through a diffuser and a nozzle to direct the flow in one preferential direction,and hence cause a net pumping direction.In order to increase the flow rate of the nozzle/diffuser pump,fin-shaped micronozzle/diffuser pump was developed in this work.Fluent was used to simulate the characteristics of fin-shaped micro-diffuser/nozzle pump,and optimized parameters were given.Measurement results show that the new design can improve the micronozzle/diffuser pumping performance of 11%.更多还原