【摘要】 利用两步阳极氧化方法在玻璃基板上成功制造孔洞排列有序的多孔氧化铝基底,实验结果表明,孔洞大小范围在10~50nm,孔洞大小可通过氧化电压和氧化温度进行调节,随氧化电压和温度降低而减小。多孔氧化铝底层对其上溅射生长的TbFeCo磁性能有重要影响,多孔氧化铝基底对TbFeCo的畴壁运动有较强的钉扎作用,增大其矫顽力,矫顽力随孔洞的直径增大而减小,从15nm时的4.5×105A/m下降到40nm时的2.8×105A/m,并逐步趋近无AAO膜板时TbFeCo的矫顽力。同时多孔氧化铝基底的引入,使TbFeCo薄膜的矫顽力机制从以磁晶各向异性为主改变为以形状各向异性为主。更多还原

【Abstract】 A self-ordered hexagonal array of nanopores has been fabricated by anodizing a thin film of Al on glass and subsequent the magnetic properties of TbFeCo on this templates were studied.We carried out anodic oxidation of a sputtered Al film at the anodic voltage in the range of 10-30V and temperature in the range of 5-40℃,and found that the density of the nanohole arrays increased with the decrease in anodization voltage and temperature.On the other hand,hole diameter decreased with the decrease in anodic voltage and temperature.Then TbFeCo is deposited onto this porous array by sputtering with a thickness of around 90nm and subsequently overcoated with 10nm SiN for the protection from surface oxidation.The TbFeCo deposited on this porous layer shows complete perpendicular anisotropy.The coercivity increased with the decrease in hole diameter.The coercivity of the TbFeCo deposited on the porous array with a mean hole diameter of around 15nm is 4.5×105A/m and larger than on the glass,but the squareness ratio gets poorer than on the glass.It seem that there were no significant changes in Ms.更多还原