【摘要】 提出了一种新型的激光光热控制触点开关式微驱动机构;对于驱动性能受到形状参数的影响进行了理论分析;采用KrF准分子激光器制备了两种不同长度的微驱动机构;自行搭建的激光光热控制实验系统,采用655nm红色激光作为驱动源,利用该实验系统进行了比较驱动实验,实验结果表明:触点偏转量随着驱动器臂长的增大而增大,同时对于相同长度的微驱动机构,触点偏转量随着驱动激光功率的增大而增大。该新型微驱动机构结构简单,制备快捷,可以采用激光对其实现远距离、非接触控制,集成度高。更多还原

【Abstract】 A novel contact-switch microactuator controlled by laser-induced photothermal expansion was presented.The drive performance,which is influenced by shape parameters was analyzed.Microactuaors with different lengths have been fabricated using KrF excimer laser.The red laser of 655 nm was used as the drive source of the laser-controlling photothermal experiment setup.The comparing experiments between the microactuators have been carried out with this experimental setup.The experiments results indicate that the contact deflection increases when the length of the microactuator elongated(laser power constant) or the laser power enlarged(length constant).This novel microactuator has a simple structure and is convenient to be fabricated.It could be manipulated by laser remotely and non-contact,therefore it has a better integral performance.更多还原