【摘要】 应用光学理论分析了一种纳米级位移分辨率的双级衍射光栅测量系统,建立了衍射莫尔信号与对应位移的数学模型,进而设计了一种基于激光莫尔信号的等离子体显示器(PDP)精密定位系统。系统以工业控制计算机为核心,取0次激光莫尔信号为控制信号,由微机控制实现高精度位移检测及全自动精密定位,从而实现PDP前基板、阴罩板与后基板3者间的全自动精密对准。提出的精密定位粗控和微控的两段式复合控制方法,可实现大行程控制下的高精度定位。系统在软、硬件方面采取的一系列抗干扰措施,确保了较高的定位精度及工作可靠性。实验结果表明,研制的屏板精密定位系统可获得±1μm的定位精度。更多还原

【Abstract】 A double-grating displacement measurement system with the resolution of nanometer order is analyzed using optics theory.A mathematic model of the double-grating displacement measurement is established.A precision positioning device of PDP with laser moiré signals is designed based on industrial control computer,which can achieve high-accuracy position detection and full automatic precision plane alignment using Moiré signals so that it could achieve automatic precision positioning of front substratum,shadow mask and behind substratum.2-stage compound control method for precision positioning,which includes macro-control and micro-control,is proposed to realize precision positioning within a wide work range.A series of anti-interference step in the hardware and software of the device effectively improve the positioning accuracy and the reliability of the device.The experimental result shows the device can perform positioning accuracy of ±1 μm.更多还原