【摘要】 MEMS中的热密度高于80 W/cm2,发热问题已严重影响着其可靠性。文中从微小结构液体冷却热交换设计理论分析和试验着手,研究高热密度情况下的MEMS散热设计。宏观下的流体力学和传热学在微尺度中存在尺度效应。由于微结构中流体表面张力的影响,使流体流动状态由层流变成紊流的重要参数雷诺数Re约为900~1100时,流动状态将发生变化。基于目前MEMS微体加工的可能,文中给出了三种在MEMS中使用的液体冷却微热交换器的设计,经计算机仿真,该热交换器有较大的使用价值。更多还原

【Abstract】 As current heat flux density inside the MEMS is already over 80 W/cm2,the thermal problem becomes a serious influence on the reliability of MEMS.In this paper,micro-structure liquid cooling analysis theory and experimental analysis were adopted to research the thermal design of MEMS with high thermal density.For the MEMS with structure of micro-scale,the macro-hydrodynamics and heat transfer theory exist scale effect in the micro-scale.Considering the surface tension in the micro-scale,the liquid flow would transfer from laminar flow to turbulent flow,when the Reynolds number Re of the micro-structure was in range between 900 and 1100.In this paper,three types of MEMS liquid cooling micro-heat exchangers were presented,which based on the bulk micro-machining.The computer simulation proved that these exchangers were potential.更多还原