【摘要】 介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。根据其运动原理特点,设计完成了该压电微动台的控制系统。在电压控制下,利用压电陶瓷的逆压电效应,通过机械装置将压电陶瓷的微小位移输出,达到精密定位的目的。最后对该控制系统进行了性能测试。实验表明,该控制系统所产生的三角波、方波信号纹波电压小,信号稳定,其中放大电路部分放大倍数为57,能够驱动所选用的压电陶瓷,满足微动台驱动要求。更多还原

【Abstract】 A kind of piezoelectric micro-actuator with Nano-step and long range,based on the principle of inchworm motion,is introduced in this paper.As to the characteristic of the piezoelectric platform,a kind of driving and controlling system is proposed.The micro-displacement of the piezoelectric actuator is transferred by the machine in order to make use of precise positioning.This result has been verified several times by experiments.The experiments show that both the triangle wave and the square wave are steady going and with little ripples,of which the amplificatory multiple is about 60.更多还原