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基于MEMS传感器技术的微型化、数字式倾角仪的研究
Study on subminature digital inclinometer based on MEMS sensor technology
【摘要】 本文介绍了一种新型的数字倾角仪。把微机电系统(MEMS)技术的高精度倾角传感器和微处理器有机结合,借助智能算法,设计了一种高性能的倾角测量仪,缩小了仪器体积,提高了仪器精度和抗震性;研究结果表明:该数字倾角仪测量范围可达±15°,分辨力达到0.01°,可广泛应用于建筑、石油、煤矿和地质勘探等各种需要测量倾角的场合。
【Abstract】 A new type of digital inclinometer is introduced.Integration tilt sensing unit applying MEMS technique with control unit(MCU),and a high capability tilt instrument is designed with the help of intelligent algorithm.This technology minifies the instrument volume and improves the precision and shock durability.The study shows that the sensor has a measuring range of ±15°and the resolving power of 0.01°.It can be widely used in any construction site,oil field,coal-mine or geologic survey,where it will provide the working people with convenience to measure angles.
【Key words】 MEMS; inclinometer; tilt angle; MSP430 microcontroller;
- 【文献出处】 电子测量技术 ,Electronic Measurement Technology , 编辑部邮箱 ,2008年02期
- 【分类号】TP212
- 【被引频次】19
- 【下载频次】531