【摘要】 利用微型笔直写技术,在Al2O3陶瓷基板上制备了4×4厚膜PTC热敏电阻温度传感器阵列。研究了驱动气压、笔嘴直径以及直写速度等对厚膜PTC热敏电阻线宽的影响,分析了微型笔直写PTC热敏电阻温度传感器的形成机理。目前微型笔在Al2O3陶瓷基板上直写的厚膜PTC热敏电阻线宽为130~400μm。高温烧结后其电阻温度系数αR为1620×10–6/℃,在25~95℃之间电阻阻值随温度的变化具有良好的线性。更多还原

【Abstract】 4×4 thick-film PTC thermistor temperature sensor array on Al2O3 ceramic substrate was prepared using micropen direct-writing technique. The effects of driving gas pressure, the diameter of nozzle, and direct writing speed on thick-film PTC thermistor line width were studied systematically. And the mechanism of PTC thermistor temperature sensor formation was analyzed. Now, the line width of thick-film PTC thermistor on Al2O3 ceramic substrate by micropen direct writing is 130~400 μm. After sintering of high temperature, its αR is 1 620×10-6 / ℃, and the dependence of resistance versus temperature between 25 ℃ and 95 ℃ is good linearity.更多还原