The Fe、Co-based alloy thin films were considered to be newly potential microwave absorbing materials on account of the high permeability, high loss, etc. The complex permeability of magnetic thin films was a significant parameter for the microwave-absorbing capability, and thus the measurement of the complex permeability of this films was proposed to be urgent. A series of electromagnetic parameters measured methods of thin film, such as the cavity perturbation method, the pick-up coil method and the transm...