【摘要】 采用溶胶-凝胶法在玻璃基片上制备出不同Al掺杂量的ZnO:Al（ZAO）薄膜。系统研究了Al掺杂量对薄膜微结构和光电性能的影响。结果表明:溶胶-凝胶法制备的薄膜具有完好C轴择优取向,在可见光区的透射率均大于85%;随着Al掺杂量的增加,薄膜的平均颗粒尺寸减小,表面电阻率先降低后升高,薄膜的光学带隙宽变宽。在5%H₂+95%N₂气氛退火可显著降低薄膜电阻率,掺Al量为2%的薄膜具有最低电阻率5.5×10^-3Ω·cm。更多还原

【Abstract】 Al-doped ZnO（ZAO） thin films with different doping concentrations are deposited on glass substrates using the sol-gel method.The effect of Al doping concentration on the microstructure,electrical and optical properties of the films is investigated.The results show that all the films prepared by the sol-gel method have high preferential C-axis orientation,and the transmittances with different Al doping concentrations are over 85%within the visible wavelength region.With increasing the Al doping concentration,the average size of the film decreases,the electrical resistivity increases first,then decreases,and the optical band-gap energy broadens.The electrical resistivity decreases obviously by 5%H₂ +95%N₂ atmosphere annealing,and a minimum resistivity of 5.5×10^-3Ω·cm is obtained for the film doped with 2%Al.更多还原