【摘要】 利用匀胶旋涂技术,将微乳-水热法制备出的、粒径均匀可控的γ-Fe2O3纳米颗粒沉积在具有独特微纳双重结构的硅纳米孔柱阵列(Si-NPA)基片上,制成γ-Fe2O3/Si-NPA湿度传感元件,并对其进行湿度感应测试结果发现,当环境相对湿度(RH)从11%升高到95%时,该元件的电容和电阻分别呈高灵敏度的单值增加和单值降低。在100 Hz的电流频率下,元件的高湿电容值升为低湿电容值的12 500%,低湿电阻值是高湿电阻值的51 515%。分析表明,微乳-水热法对γ-Fe2O3纳米颗粒尺寸的控制以及Si-NPA衬底的独特结构是提高元件灵敏度的主要原因。更多还原

【Abstract】 γ-Fe2O3 nanocrystals were deposited on the silicon nano-porous pillar array(Si-NPA) template which has special micro-nano hierarchical structure to prepare a γ-Fe2O3/Si-NPA humidity sensor.The size of γ-Fe2O3 nanocrystal could be controlled by a new chemical method of microemulsion and hydrothermal.Room temperature capacitive and resistive sensitivity of this γ-Fe2O3/Si-NPA sensor was investigated.The sensor’s capacitance and resistance are very sensitive to humidity.When the relative humidity(RH) changed from 11% to 95%,the sensor’s capacitance showed a great increment of 12 500% and its resistance showed a great fall of 51 515% at the signal frequency of 100 Hz.The high performances of the γ-Fe2O3/Si-NPA sensor are explained on the basis of the surface structure contributed by the microemulsion and hydrothermal method and the Si-NPA template.更多还原