【摘要】 提出了一种锆钛酸铅(PZT)薄膜微致动器的结构模型。该致动器采用高d33特性的压电陶瓷材料,用于对空间谐振式微光机电(MOEMS)陀螺微镜进行位移和角度的精确定位。建立了该致动器的简化模型并利用有限元方法分析其驱动能力。结果显示,当采用双层结构的PZT薄膜微致动器时,在外加电压50V作用下,环形PZT位移控制器中心位移可达到0.345μm;十字形角度控制器偏转角度可达3.29″,增加PZT薄膜的层数可以进一步增加致动器对微镜位移和角度的控制能力。通过对仿真结果进行分析可以得出结论,选用多层PZT薄膜材料制成的微致动器能够满足调整微镜位移和角度所需的范围和精度要求。更多还原

【Abstract】 This paper reports on a structure model of a lead-zirconate titanate(PZT)thin film micro-actuator.This actuator,which is fabricated with the PZT material of high d33 characterization,has been used to precisely control the displacement and the angle of the micro mirror in spatial resonance MOEMS gyroscope.The predigestion model of the actuator is set up,and its driving ability has been analyzed with the finite element method.As it is shown in the result,when the micro-actuator with two layers of PZT thin film has an applied voltage of 50 V,the center displacement of the displacement actuator could be 0.345 μm,and the deflexion angle of the angle actuator could be 3.29″.Also,if the layers of the PZT thin film are added,the actuate ability to the displacement and angle would be better.Results indicates that this actuator which is made by multi-layer PZT thin film has the ability to satisfy the actuate range and precision requirement of the micro mirror displacement and angle actuator.更多还原