【摘要】 刮板式微致动器,是一种可以实现大位移、步进式MEMS纳米微致动器。结合刮板式微致动器的表面硅加工工艺,考虑支撑梁的反作用力建立了新的理论分析模型,分析了微致动器的临界电压、单步位移以及最大输出位移等几个重要性能参数,将理论模型的计算结果与已有的实验数据以及理论模型作了对比。结果表明,本文理论分析模型的的理论值与实验结果有较好的一致性。更多还原

【Abstract】 In the field of micro-electro-mechanical system actuator,the scratch drive actuator(SDA)is the one,which can realize long distance travel with precise nanometer step sizes.A newly revisory analytical model of the scratch drive actuator including the effects of the MEMS Surface-Micromachining processing parameter and the counterforce of the support arms is proposed.The performance of the SDA is analyzed,such as the critical voltage,the step size and the total displacement.The good agreement between the simulation results and the experimental data is obtained更多还原