【摘要】 微加速度计用于测量载体的加速度,并提供相关的速度和位移信息。微加速度计可以和微型陀螺仪组合构成微型惯性测量单元。但是微加速度计还没有完全实现市场化,微加速度计的可靠性问题已经成为制约其广泛应用的关键因素。微加速度计在加工、封装、运输和实际使用中都可能受到冲击的作用。主要研究压阻式微加速度计在冲击环境下的可靠性问题。通过简化加速度计的结构,得出了悬臂梁上的应力分布。设计了微加速度计在冲击环境下的可靠性试验,分析了加速度计在冲击环境下的主要失效模式及失效机理。得出了压阻式加速度计在冲击环境下的主要失效模式是键合引线的脱落和悬臂梁的断裂。更多还原

【Abstract】 Micro accelerometer is used to sense the acceleration of the object and provide velocity and displacement information. Micro accelerometer combines with micro gyroscope that can be used as an element of micro inertia measurement. But the reliability issues of the micro accelerometer impact the accelerometer go to the market. Micro accelerometer could experience the shock in fabrication, package, transportation and application. Piezoresistive micro accelerometer reliability in shock environment is studied. By simplify the structure of the accelerometer, obtaining the stress distribution on the cantilever. The reliability experiment is designed, obtaining the main failure modes and failure mechanisms of micro accelerometer in shock environment. The main failure modes of the micro accelerometer in shock environment are fracture of the cantilever and the wire bond shearing.更多还原