【摘要】 介绍了配置在扫描电镜（SEM）中的微操纵仪（MMS）的操作原理、性能及应用.MMS在水平转动（X轴）,上下转动（Y轴）和线性进退（Z轴）的移动精度分别达到5,3.5,0.25nm.利用具有纳米精度的移动和定位的MMS,对BiVO₄晶体、硅藻土、蛋白石和ZnO纳米线等纳米材料进行了原位操纵和动态观察.该装置可操纵质量为纳克级,尺寸为几百纳米至几微米的样品.SEM-MMS系统为原位分析纳米材料提供了一种崭新的手段.更多还原

【Abstract】 The operating principle,the performance and the application of a micromanipulator system（MMS） setup in a scanning electron microscope（SEM）is introduced in this paper.The movement precision of the MMS in clock-unclockwise rotation（X-axis）,up-down rotation（Y-axis）,and retreat-forward linearity（Z- axis）is 5,3.5 and 0.25 nm,respectively.The MMS with nano-precision in the movement and the position was used to in-situ manipulate and dynamically observe nano-sized materials,including BiVO₄ crystals, diatomites,opals and ZnO nanowires.The setup can manipulate the samples,which possess the quality within nano kilogram and the size from several hundred nanometers to several micrometers.The SEM-MMS system is a novel means for in-situ analysis of nano-sized materials.更多还原