【摘要】 研究了基于AlGaN/GaN型结构的气敏传感器对于CO的传感性.制备出AlGaN/GaN型气敏传感器器件,并测试得到了器件在50℃时对于不同浓度(1%,9000,8000,5000和1000ppm)的CO的响应情况;测试并分析了1%CO在50和100℃下响应度的差异,计算了通入1%CO前后器件的肖特基势垒高度的变化和灵敏度随电压的分布关系.结果表明,器件的灵敏度强烈依赖于器件的工作温度和通入的气体浓度,随着温度和浓度的增加,器件的灵敏度呈单调增加,器件在100℃空气气氛中表现出了良好恢复性能.更多还原

【Abstract】 This paper reports gas sensors based on an AlGaN/GaN structure for CO detection.The devices have been fabricated and showed remarkable sensitivity at measured temperatures.Response characteristics of the devices have been measured under different CO concentrations (1%,9000ppm,8000ppm,5000ppm,1000ppm) at 50℃.For the sake of comparison,the response of the device induced by 1% CO at 100℃ has also been measured.The sensitivity and variation of Schottky barrier height induced by 1% CO have been calculated at 50℃ and 100℃,respectively.Finally,the sensitivity strongly depends on the temperature and the CO concentration and increased as the temperature and concentration increased.更多还原