【摘要】 以IC1000/Suba IV抛光垫为例,综述了影响抛光垫性能的各种因素,以文献相关数据为依据,着重分析了抛光温度和修整力对抛光垫性能的影响。从分析结果可以得出:IC1000/Suba IV比单层结构IC1000具有更好的抛光效果;新旧抛光垫性能在0~40°C基本相当;新、旧和没有黏合剂抛光垫的正常工作温度为-2.02~103.64°C,且玻璃过渡温度随着抛光垫厚度的减小而增加;抛光垫在0~50°C具有最小的外形变化。定性得出修整力与抛光精度成反比关系,明确了较小修整深度具备较好的平坦化效果。更多还原

【Abstract】 As for IC1000/Suba IV polishing pad,the various factors impacting the performance of the polishing pad are summarized.Based on the relevant data of literatures,the influence of the temperature and conditioning force on the performance of the pad is analyzed.The analysis results show that IC1000/Suba IV has better polishing effect than single structure IC1000.The performances of the new and the old polishing pads are comparable at 0-40 °C.The normal working temperatures of the new/old polishing pads and the polishing pad without adhesive are from -2.02 to 103.64 °C. The glass transition temperature increases with the decrease in the polishing pad thickness.The pad has the smallest shape change at 0-50 °C.The inverse proportional relationship between the conditioning force and polishing precision is qualitative analyzed,and the smaller conditioning depth has the better flat effect.更多还原