【摘要】 提出了一种基于Stoney公式测量金属基体上硬质薄膜内应力的应力释放法,并研究了不同基底温度对磁控溅射TiN薄膜内应力的影响。更多还原

【Abstract】 In this paper,a new way of measurement based on Stoney Equation was proposed,in which the internal stresses in the hard thin films deposited on metal substrate could be measured.And the effect of the substrate’s temperature on internal stresses in magnetron sputtering TiN thin films was evaluated.更多还原