【摘要】 在环境扫描电镜(ESEM)中配置加热台,对Al2O3样品进行加热实验。结果表明,Al2O3表面的荷电效应随温度的稳定升高而逐渐减小。当温度上升至~360℃时,荷电效应完全消除,得到清晰的二次电子(SE)像。在加热过程中,Al2O3样品的吸收电流(Ia)值不断提高,在~360℃时达到2.67×10-7A。这个值相当于Al样品台的Ia值,表明加热可增加Al2O3表面的导电率。此外,在高真空环境中通过加热消除荷电后,得到的Al2O3样品的SE像衬度优于通常在低真空环境中通过电子-离子中和作用得到的图像衬度。更多还原

【Abstract】 A novel technique—in-situ stable heating—has been successfully developed to effectively eliminate charges accumulated on Al2O3 sample in the environmental scanning electron microscope(ESEM).We found that as the temperature steadily rises up,the charge on Al2O3 surface gradually decreases.At about 360 ℃,the surface charge can be completely removed and a well-focused,and fine,secondary electron(SE) images can be observed.As the sample temperature increases,the increasing absorbed current,Ia,goes up to 2.67×10-7 A at 360 ℃,indicating that heating enhances the surface conductivity of Al2O3.Moreover,when it comes to the contrast of SE image,heating in high-vacuum works much better than the conventional electron-ion neutralization in low vacuum.更多还原