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利用飞行时间质谱研究热阴极蒸发特性
Time of Flight Mass Spectroscopy Study of Thermonic Cathode Evaporation
【摘要】 提出了采用飞行时间质谱(ToFMS)分析阴极蒸发的成分和速率的新方法。利用ToFMS测试了真空本底、氧化物阴极、浸渍阴极、覆膜阴极等各种阴极蒸发物的成分。研究了阴极蒸发速率与阴极温度和加热时间的关系。比较了不同阴极蒸发速率的大小。实验结果表明ToFMS是一种非常快捷的研究阴极蒸发的实验手段。最后,研究了阴极各种成分离子峰强度与电离电压的关系。
【Abstract】 Chemical compositions of the evaporated materials from different types of thermonic cathodes were studied with time-of-fight mass spectroscopy(ToFMS).The influence of the cathode temperature and heating time on the evaporation rate was studied.In addition,the relation between the peaks intensiy of various ions,and the including Ba+,Ba2+ and BaO+,and the ionization voltages was discussed.We suggest that ToFMS works fast and effective in characterizing evaporation of thermonic cathodes.
【关键词】 阴极蒸发;
飞行时间质谱;
蒸发速率;
离子流;
【Key words】 Evaporation of cathode; ToFMS; Evaporation rate; Ion current;
【Key words】 Evaporation of cathode; ToFMS; Evaporation rate; Ion current;
- 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2007年05期
- 【分类号】O462
- 【被引频次】27
- 【下载频次】149