【摘要】 超磁致伸缩执行器(GMA)具有大行程、低压驱动、大功率、大承载等优越性能,在精密、超精密加工等领域具有广阔的应用前景。文章分析了超磁致伸缩执行器内部的热变形机理,提出了采用半导体制冷技术的GMA温控系统设计方案,同时在热端采用水冷强化散热措施,提高了半导体的制冷效率和系统的温控精度。更多还原

【Abstract】 Giant magnetostrictive actuator(GMA),having the advantages of long travel range,low voltage drive,high power and large load capacity,etc,has a promising prospect in the fields of precision finishing and ultraprecision machining.In this paper,the problem of thermal deformation in GMA was analyzed,and a new method of temperature control system using the technology of semiconductor refrigeration was presented.Meanwhile the action of water cooling was taken to enhancing the heat loss of hot-side,which can improve the efficiency of semiconductor refrigeration and the temperature control precision of system.更多还原