【摘要】 末端气流分布装置是洁净室的一个重要部件,直接影响到洁净室的气流分布情况。从射流扩散和射流强度的角度,采用了理论和实验的方法分析了分别经由散流器、局部孔板和旋流风口三种末端气流分布装置所形成的射流对洁净室运行的影响,从而指出了装置的使用场合。更多还原

【Abstract】 End airflow distribution device, which directly influence the air distribution in cleaning room, is an important component in cleaning room. In this article, with the respects of efflux diffusion and efflux strength, the theoretical and experimental methods were employed to analyze the influence of efflux from three end airflow distributors, diffuser, perforated ceiling and twist outlet, to the cleaning room.更多还原