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PbxSr1-xTiO3陶瓷及薄膜的制备和性能研究
Preparation and Properties of PbxSr1-xTiO3 Ceramics and Thin Films
【摘要】 研究了Pb的摩尔分数对PbxSr1-xTiO3(x=0.2~0.8)陶瓷微结构和介电性能的影响,当x<0.45时晶体为立方相,x≥0.45时为四方相;随着Pb的摩尔分数增大,陶瓷气孔率下降,致密度增加,晶粒尺寸逐渐增大,居里峰近似线性地向高温方向移动,并具有一致的居里外斯常数。采用射频磁控溅射法在Pt/Ti/SiO2/Si(100)上制备了Pb0.3Sr0.7TiO3(PST30)薄膜,经550℃退火后为(111)择优取向的多晶薄膜,1 kHz下的可调率为21.8%。
【Abstract】 PbxSr1-xTiO3(x=0.2~0.8) ceramics are prepared,and the effect of the Pb content on the microstructure and dielectric properties are studied.X-ray diffraction studies show that the lattice structure changes from cubic to tetragonal phase at 45 % Pb content.Scanning Electron Microcopy studies indicate that the higher Pb content is,the greater grain size and the higher density is.εr-T curve exhibits that Curie-Temperature linearly increases with the increase of Pb content and the compositions(x=0.20~0.55) show the similar Curie-Wiess constant.Pb0.3Sr0.7TiO3 thin film are prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si(100) substrate and annealed at 550 ℃.Meanwhile,the films exhibit(111) orientation and the tunability is measured to be 21.8% at 1 kHz.
【Key words】 PbxSr1-xTiO3 ceramics; RF magnetron sputtering; Pb0.3Sr0.7TiO3 thin film; microstructure; dielectric properties;
- 【文献出处】 压电与声光 ,Piezoelectrics & Acoustooptics , 编辑部邮箱 ,2007年06期
- 【分类号】TM282
- 【下载频次】64