【摘要】 从高分子辐射化学的角度对电子束环氧基负胶曝光的实际反应机理进行了深入的分析研究,通过Charlesby-Pinner关系式推导得出辐射交联反应中一些表征量(溶胶分数等)与辐射剂量的定量关系。通过SDS-Ⅱ型曝光机对环氧Epoxy618进行曝光实验,验证了上述结论的准确性,该论证结果用于指导电子束曝光参数的选取。更多还原

【Abstract】 Based on macromolecule radiation chemistry,the practical exposure reaction mechanism of electron beam negative resist with epoxy groups was analyzed.A relationship of the sol fraction with the radiation dose in the crosslinking reaction was deduced by the Charlesby-Pinner Equation and it was proved to be correct by the experiment which Epoxy618 was exposed by SDS-Ⅱ lithography systems,and it can be used for selection of electron beam exposure parameters.更多还原