【摘要】 用CH4,NH3和H2为反应气体,利用等离子体增强热丝化学气相沉积在沉积有Ta缓冲层和Ni催化剂层的Si衬底上制备了准直碳纳米管,并用扫描电子显微镜和透射电子显微镜对它们进行了研究。结果发现,尽管碳纳米管在相同的生长条件下生长在同样的衬底上,其直径和长度仍不同,表明它们是非均匀生长。应用有关热力学理论研究了碳纳米管生长的非均匀性,结果表明,碳纳米管的非均匀生长是由催化剂颗粒的大小不同所致。更多还原

【Abstract】 Aligned carbon nanotubes were synthesized on silicon substrate coated with Ni catalyst film and Ta buffer layer by plasma-enhanced hot filament chemical vapor deposition using CH4,NH3,and H2 as the reaction gas,and they were investigated by scanning electron microscopy and transmission electron microscopy.It was found that the diameters and lengths of the aligned carbon nanotubes were different although they were grown on the same substrate under the same conditions,indicating that their growth is inhomogeneous.The theory related to thermodynamics was applied to study the inhomogeneous growth of the aligned carbon nanotubes and the result indicates that the inhomogeneous growth results from different size of the catalyst particles.更多还原