【摘要】 针对各类毫瓦级超声功率计的量值溯源问题,选用压电陶瓷材料,根据其压电效应原理,设计为厚度伸缩振动模式,采用能陷技术及真空镀膜等技术工艺,制作了一系列1MHz、3MHz、5MHz的园片形单元超声换能器,并研制与之配套的阻抗匹配器,与功率信号源等,组成一套毫瓦级超声功率传递标准。该套标准经济实用、性能可靠稳定,重复性好,有效地解决了毫瓦级超声功率计的量值溯源问题。更多还原

【Abstract】 Thickness extension oscillation mode was designed according to the piezoelectricity principle of the selected piezoelectric ceramic materials,a series of 1MHz,3MHz,5MHz circular ultrasonic transducer units were prepared with those technologies such as trapped energy,vacuum coating,etc.,and their corresponding impedance matching system,power intelligent signal,etc.were developed too.All the above formed a milliwatt ultrasonic power transfer standard to solve the measurement traceability problem of milliwatt ultrasonic power meters.This standard is economical and practical,its performance is reliable and stable,and it has excellent repeatability.Thus it can solve the measurement traceability problem of milliwatt ultrasonic power meters effectively.更多还原