【摘要】 采用离子束溅射沉积镀膜法制备了DLC薄膜,研究了偏压对薄膜性能的影响。通过原子力显微镜(AFM)和拉曼光谱对DLC薄膜的表面形貌以及内部结构进行了分析表征。并用UTM-2摩擦磨损仪对其摩擦学性能进行了测试。结果表明,利用离子束溅射沉积制备的DLC薄膜具有良好的减摩抗磨性能。随着偏压的增加薄膜的摩擦因数先减小后增加,在-150 V偏压时,薄膜的摩擦学性能最好。更多还原

【Abstract】 Diamond-like carbon films(DLC films) were prepared by ion beam sputtering deposition and the effects of the bias on the properties of the films were studied.The surface topography and microstructure of the films were measured by AFM and visible Raman spectroscopy.The friction and wear behavior of the DLC films sliding against stainless steel was examined on UTM-2.The results show that DLC films prepared by ion beam sputtering deposition have good friction-reducing and wear resistant.With the increase of negative bias,the coefficient of friction decreases first and then increases.DLC film deposited under negative bias of-150 V is superior to others.更多还原