【摘要】 介绍了基于MEMS技术的微型加速度传感器的原理、制作工艺、测试电路及测试结果。设计原理是把加速度变化转换为传感器的电容变化,制作上以硅-玻璃键合技术、玻璃和质量块的腐蚀工艺以及等离子刻蚀技术(ICP)为主要的工艺过程。传感器的测试采用方波为激励信号,采用CMOS电路来提高测量电容的灵敏度。结果表明,该传感器性能稳定、线性范围广、灵敏度高。更多还原

【Abstract】 The principle,the fabrication and the testing of a new type of capacitive acceleration micro sensor based on MEMS is introduced in this paper. The principle of the sensor is to transform the change of acceleration to that of capacity. The process included the Banding of the silicon and the glass,the etching of the glass and the mass,the etching using ICP. The testing employed CMOS circuit to improve sensitivity,using square wave as the testing signal. The test showed that the micro sensor has excellent linearity,relatively high sensitivity and relatively good stability.更多还原