【摘要】 利用聚焦离子束(focused-ion-beam,FIB)刻蚀在纳米厚的单晶硅悬臂梁表面来制备三维纳米螺旋.单端固支的悬臂梁在FIB刻蚀引入的应力下卷曲,通过控制FIB应力引入的角度和间距,可制备出螺径在540~840 nm、螺距在1780~2160 nm间的系列三维纳米螺旋.利用原子力显微镜对纳米螺旋的机械特性进行了测量与研究.实验测得退火前与退火后的螺旋的横向弯曲弹性系数分别为40.74 N/m和16.45 N/m,而与之比较的单端悬臂梁的横向弯曲弹性系数在退火前后没有明显的变化.此外,在环境扫描显微镜中进行了螺旋的机构稳定性研究,实验发现FIB刻蚀制备的螺旋结构的稳定性很好.更多还原

【Abstract】 This paper presented 3D silicon nanosprings fabricated by focused-ion-beam(FIB) milling on nanometer-thick single crystal silicon cantilevers,which brought a distribution of nanoscale localized stress into the silicon films and caused their deformation.By intentionally controlling FIB milling on nanometer-thick silicon films,a series of 3D nanosprings with diameters ranging from 540 nm to 840 nm and pitch distances ranging from 1 780 nm to 2 160 nm were achieved.With AFM,the mechanical properties of the fabricated silicon nanospring structures were investigated.The measured transverse buckling stiffness of the nanospring was about 40.74 N/m before anneal and 16.45 N/m after anneal,respectively,while that of silicon nanospring structures was stable because there was no obvious change in their dimensions before and after anneal with ESEM.更多还原