【摘要】 提出了一种新颖的面向大屏幕高清晰度显示的光栅光调制器(GLM)阵列.它利用光衍射原理对入射光进行调制.GLM是在硅片上分层构造的器件,采用以铝膜工艺为主的表面微加工工艺.在研制过程中器件翘曲成为制约器件性能的关键问题.从残余应力分析入手,分析了产生残余应力的原理,并提出使用单金属膜并控制工艺参数的改进方案.另外,采用"减薄梁"的工艺,使大部分应力释放在刚性较弱的支撑梁上.加工结果印证了理论分析和仿真,最终器件获得了较为平坦的表面.更多还原

【Abstract】 A novel grating light modulator(GLM) array for large screen and high definition display was presented in this paper.It modulates light by diffraction.GLM is a two-layer device fabricated on the silicon substrate.It is made of Al film by surface micromachining process.But buckling of GLM pixels seriously degrades its performance.Factors causing residual stress and buckling were analyzed.Then the improved measurement combining using single layer metal film with controlling the temperature in fabrication process.Furthermore, the process of "beam with reduced thickness" releases most of the stress onto the flexible supports.The fabrication results show that the surface of new device pixel is more smooth,which verifies the theoretical analyses and simulations.更多还原