【摘要】 提出了一种基于锆钛酸铅(PZT)压电厚膜致动器阵列驱动的MEMS微变形镜,建立了该微变形镜的结构模型,分析了其结构中各层厚度对其性能的影响.PZT压电厚膜是通过基于PZT压电陶瓷体材料的湿法刻蚀技术制备的,刻蚀液为1BHF∶2HCl∶4NH4Cl∶4H2O.以数字锁相方法测试了压电厚膜的介电性能,在100 kHz以下时,其介电常数和介质损耗分别优于2 400和3%.利用悬臂梁方法测试了压电厚膜的d31横向压电系数,约为-250 pm/V.制备了4×4阵列的压电致动器阵列.采用激光多普勒测试压电致动器的电压位移曲线,在100 V的电压驱动下致动器的变形量大约为2.2μm;测试了致动器的频率响应,其谐振频率高于100 kHz;致动器刚度大,带负载能力强.更多还原

【Abstract】 A novel MEMS deformable mirror actuated by Pb(ZrxTi1-x)O3(PZT) thick film actuators array was presented in this paper.The analytical model was established and employed for structure optimization of the bulk PZT actuator.PZT thick films were prepared by thinning bulk PZT ceramics using wet-etching method.The etchant was 1BHF∶2HCl∶4NH4Cl∶4H2O.The dielectric properties of the PZT thick films were measured using lock-in technique.The dielectric constant and dielectric loss are better than 2 400 and 3%,respectively,when the frequency is lower than 100 kHz.The piezoelectric property was measured using a fabricated piezoelectric cantilever and the results indicate that the d31 coefficient of the PZT thick films is approximately-250 pm/V.A 4×4 array prototype of 2.5 mm-diameter bulk PZT actuators was fabricated.Performances of the bulk PZT actuators were evaluated with laser Doppler vibrometer.The PZT actuators show a deformation of 2.2 μm at 100 V and resonant frequency of higher than 100 kHz.The bulk PZT actuator exhibits large stiffness.更多还原