【摘要】 环形锯丝线锯切割具有速度高,切割表面粗糙度值低的特点。研制了一种环形锯丝线锯床,锯丝线速度可达28 m/s,锯床运动精度高、锯丝振动小。采用工艺措施保证轴承孔及主轴的加工精度。根据测量结果,研磨轴承内、外隔套,调节轴承间隙和刚度。应用该锯床切割硅晶体材料,切割表面平整,无崩碎现象,表面粗糙度达1.6μm。更多还原

【Abstract】 The looped wire saw is much higher at speed,so its cutting surface is low in roughness.A looped wire saw is manufactured the wire speed is 28 m/s in which.The movement is high at accuracy and the wire is less in vibration amplitude.Some technologies are adopted to assure the accuracy of bearing holes and spindle.According to the measuring result,we lap the inner and outside washer to regulate the clearance and rigidity of bearings.Crystal silicon is cut in this saw.The cutting surface is smooth without fragment and the surface roughness is 1.6 μm.更多还原