【摘要】 利用溶胶-凝胶法在(100)Si片和玻璃衬底上制备出Mg2+掺杂的ZnO(MgxZn1-xO)薄膜,研究了Mg2+掺杂对ZnO薄膜结构和光学性能的影响。XRD图谱表明,当x<0.30时,MgxZn1-xO薄膜为纤锌矿结构,随着x值的增加,晶格常数c逐渐减小,a逐渐增大,但晶胞体积V几乎不变;当0.3≤x<0.7时出现相分离;当x≥0.7时,MgxZn1-xO薄膜为MgO的立方相结构。紫外可见光透射光谱表明,Mg2+掺杂增大ZnO薄膜的禁带宽度,同时也提高可见光的透过率。更多还原

【Abstract】 Zinc oxide thin films doped with Mg2+(MgxZn1-xO)were prepared on(100)silicon and glass substrates by the sol-gel method.The influence of Mg2+ dopants on the microstructure and optical property of MgxZn1-xO thin films were investigated in detail.The XRD results indicated that when the value of x was smaller than 0.3 the MgxZn1-xO thin films retained the wurtzite structure of ZnO.With the increase of the value of x the lattice constants c decreased and the lattice constants a increased,but the cell volume hardly changed.As the value of x was between 0.3 and 0.7,phase separation was observed.When the value of x was larger than 0.7,the crystalline structure of MgxZn1xO thin films changed to the cubic structure of MgO.The transmittance measurement results showed that Mg2+ doping in ZnO thin films enlarged the band gap and the transmittance in the visible region.更多还原