【摘要】 本文研制了强直流伸展电弧金刚石涂层沉积设备,它可产生长达400 mm的等离子体弧柱,可沉积金刚石涂层的区域大,能够在复杂形状硬质合金刀具上沉积金刚石涂层,有利于实现金刚石涂层硬质合金工具的产业化生产。在直径1 mm的微型铣刀上沉积了纳米金刚石涂层,研究了沉积压力对金刚石涂层组织的影响,沉积压力对金刚石涂层的晶粒尺寸和表面形貌有显著影响。随着沉积压力的降低,沉积的金刚石涂层晶粒尺寸减小,当沉积压力为0.80 kPa时,可沉积出纳米金刚石涂层。涂层的厚度均匀,其表面光滑、平整,且与硬质合金基体之间有较好的附着力。用激光Ram an对金刚石涂层进行了表征。更多还原

【Abstract】 A high current extended DC arc plasma CVD apparatus was developed.The length of arc column is 400 mm and the effective area of diamond deposition is relatively large.Diamond coating deposition on cemented carbide cuttings tools with complicated shapes was realized.Nanocrystalline diamond coatings were produced on micro-tools with 1 mm diameter.The effect of pressure on the microstructure of diamond coatings was studied.At a deposition pressure of 0.80 kPa,nanocrystalline diamond coatings were obtained.The surface of the nanocrystalline diamond coating is smooth.Raman spectroscopy was conducted to evaluate the diamond films.更多还原